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The determination of the efficiency of energy dispersive X-ray spectrometers by a new reference material

TitoloThe determination of the efficiency of energy dispersive X-ray spectrometers by a new reference material
Tipo di pubblicazioneArticolo su Rivista peer-reviewed
Anno di Pubblicazione2006
AutoriAlvisi, Marco, Blome M., Griepentrog M., Hodoroaba V.-D., Karduck P., Mostert M., Nacucchi Michele, Procop M., Rohde M., Scholze F., Statham P., Terborg R., and Thiot J.-F.
RivistaMicroscopy and Microanalysis
Volume12
Paginazione406-415
ISSN14319276
Abstract

A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance. © Microscopy Society of America 2006.

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URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-33750303919&doi=10.1017%2fS1431927606060557&partnerID=40&md5=c0a4da2a3283567b07cfe1b0bcd71b06
DOI10.1017/S1431927606060557
Citation KeyAlvisi2006406