| Title | The determination of the efficiency of energy dispersive X-ray spectrometers by a new reference material |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 2006 |
| Authors | Alvisi, Marco, Blome M., Griepentrog M., Hodoroaba V.-D., Karduck P., Mostert M., Nacucchi Michele, Procop M., Rohde M., Scholze F., Statham P., Terborg R., and Thiot J.-F. |
| Journal | Microscopy and Microanalysis |
| Volume | 12 |
| Pagination | 406-415 |
| ISSN | 14319276 |
| Abstract | A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance. © Microscopy Society of America 2006. |
| Notes | cited By 21 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33750303919&doi=10.1017%2fS1431927606060557&partnerID=40&md5=c0a4da2a3283567b07cfe1b0bcd71b06 |
| DOI | 10.1017/S1431927606060557 |
| Citation Key | Alvisi2006406 |
