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Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

TitoloStructural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance
Tipo di pubblicazioneArticolo su Rivista peer-reviewed
Anno di Pubblicazione1999
AutoriAlvisi, Marco, Scaglione S., Martelli S., Rizzo Antonella, and Vasanelli L.
RivistaThin Solid Films
Volume354
Paginazione19-23
ISSN00406090
Parole chiaveDeposition, Film growth, Hafnium compounds, Ion beams, Ion bombardment, Ion momentum transfer, Optical films, Optical glass, Phase transitions, Silica, spectrophotometry, Substrates, Thin films, X ray diffraction analysis
Abstract

Hafnium oxide (HfO2) films were deposited on silica and glass substrates by ion (Xe+) assisted deposition with increasing ion momentum transfer to the growing film. The relationship among the ion momentum values, the crystalline phase and the refractive index (packing density) has been worked out by means of X-ray diffraction and spectrophotometric analysis. Compaction of the films by ion beam assistance is clearly evidenced by the changes in their microstructure. A three steps transition from a random monoclinic phase, via amorphous phase, up to an highly phase oriented (fiber texture), as a function of ion momentum, has been found.

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cited By 67

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0033366037&doi=10.1016%2fS0040-6090%2899%2900534-9&partnerID=40&md5=0d54d849072529016134534bc9a668d3
DOI10.1016/S0040-6090(99)00534-9
Citation KeyAlvisi199919