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SAW NOx gas sensor using WO3 thin-film sensitive coating

TitoloSAW NOx gas sensor using WO3 thin-film sensitive coating
Tipo di pubblicazioneArticolo su Rivista peer-reviewed
Anno di Pubblicazione1997
AutoriPenza, Michele, and Vasanelli L.
RivistaSensors and Actuators, B: Chemical
Volume41
Paginazione31-36
ISSN09254005
Parole chiaveAcoustic surface wave devices, Electrochemical sensors, Gas sensitive coatings, Metallic films, Nitrogen oxides, Sputter deposition, Surface acoustic wave gas sensors, Thin films, Tungsten compounds
Abstract

A surface acoustic wave (SAW) delay line has been implemented onto a 128° YX-LiNbO3 piezoelectric substrate as gas sensor. WO3 thin films have been deposited by reactive rf sputtering onto the SAW propagation path as gas sensitive coating. The SAW sensing element detects NO and NO2 in dry air in the gas concentration range 0-4400 ppm and 0-100 ppm, respectively, and in the temperature range 100-250°C. The SAW phase response towards NOx is higher than that of two main interfering gases, such as CO and CH4. Preliminary results on the sensing characteristics of the SAW NOx gas detector based on WO3 thin films are reported and discussed. © 1997 Elsevier Science S.A.

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URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0031169644&doi=10.1016%2fS0925-4005%2897%2980274-2&partnerID=40&md5=52f4e519dba3430d8d32ee101e8f9566
DOI10.1016/S0925-4005(97)80274-2
Citation KeyPenza199731