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Surface acoustic wave humidity sensor using polyvinyl-alcohol film

TitoloSurface acoustic wave humidity sensor using polyvinyl-alcohol film
Tipo di pubblicazioneArticolo su Rivista peer-reviewed
Anno di Pubblicazione1999
AutoriPenza, Michele, and Anisimkin V.I.
RivistaSensors and Actuators, A: Physical
Volume76
Paginazione162-166
ISSN09244247
Parole chiaveAcoustic surface wave devices, Alcohols, Ammonia, Atmospheric humidity, Carbon monoxide, Chemical sensors, Hydrogen, Hygroscopic properties, Hysteresis, Lithium niobate, Nitrogen oxides, Organic vapours molecules, Plastic films, Polyvinyl alcohols, Substrates, Surface acoustic wave sensor
Abstract

A surface acoustic wave (SAW) sensor has been fabricated and used to study the hygroscopic properties of the polyvinyl-alcohol (PVA) polymer film as layer chemically sensitive to relative humidity (RH). A 42 MHz SAW device has been configured as delay line onto 128° YX-LiNbO3 substrate with the SAW path totally covered by the spin-coated PVA film. The SAW phase response of the sensor shows high sensitivity toward RH, excellent repeatability of the response, quite good water-resistance of the PVA film, low hysteresis, at room temperature. The SAW PVA sensor shows negligible cross sensitivity toward gases (NH3, NO2, CO, H2) and seems to be sensitive toward organic vapours molecules (ethanol, methanol) containing OH groups.

Note

cited By 100; Conference of Proceedings of the 1998 Eurosensors XII ; Conference Date: 13 September 1998 Through 16 September 1998; Conference Code:56003

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0342626599&doi=10.1016%2fS0924-4247%2899%2900004-7&partnerID=40&md5=f51af2b4f11d89ca4f0525cb28f98e01
DOI10.1016/S0924-4247(99)00004-7
Citation KeyPenza1999162