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Gas recognition by activated WO3 thin-film sensors array

TitoloGas recognition by activated WO3 thin-film sensors array
Tipo di pubblicazioneArticolo su Rivista peer-reviewed
Anno di Pubblicazione2001
AutoriPenza, Michele, Cassano Gennaro, and Tortorella F.
RivistaSensors and Actuators, B: Chemical
Volume81
Paginazione115-121
ISSN09254005
Parole chiaveCatalysis, Chemical activation, Chemical sensors, Pattern Recognition, Principal component analysis, Thin film devices, Thin film sensors, Tungsten compounds
Abstract

We have designed and fabricated a sensors array using WO3 thin films for gas analysis purposes. The sensing surface of the rf sputtered WO3 thin films has been differently activated by evaporated Pd, Au, Bi, Sb catalysts. The sensors have been characterized by d.c. electrical measurements for different gases such as H2S, SO2, CH4, NO, NO2 in a proper concentration range from 1 to 7000ppm in dry air, at 180°C. Operation of the sensors under these conditions proved to be a useful way of providing a sensitive, reproducible, reversible, stable system for gas detection of ppm level. Principal component analysis (PCA) has been used in order to classify and identify different classes of target gases. Good separation among classes of sample gases has been obtained by applied PCA methods. The preliminary results show the feasibility of the electronic nose system to discriminate and recognize various tested reducing and oxidizing gases. © 2001 Elsevier Science B.V. All rights reserved.

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cited By 95

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0035892635&doi=10.1016%2fS0925-4005%2801%2900941-8&partnerID=40&md5=244044bfe8ee8f8a84f1b3b52a85d6ef
DOI10.1016/S0925-4005(01)00941-8
Citation KeyPenza2001115