Produzione scientifica
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Filtri: Autore is Loreti, S. and Parola Chiave is Microelectronics [Clear All Filters]
In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: Influence of metal diffusion on the film morphology and on the growth rate,
, Thin Solid Films, Volume 458, Number 1-2, p.1-8, (2004)