Titolo | Single shot laser damage in ultraviolet mirrors with a stepwise reflectivity profile |
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Tipo di pubblicazione | Articolo su Rivista peer-reviewed |
Anno di Pubblicazione | 2000 |
Autori | Diso, D., Perrone M.R., Piegari A., Protopapa Maria Lucia, and Scaglione S. |
Rivista | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 18 |
Paginazione | 477-484 |
ISSN | 07342101 |
Parole chiave | Coatings, Excimer lasers, Laser damage, Laser pulses, Microscopic examination, Mirrors, Photoacoustic beam deflection techniques, Photoacoustic spectroscopy, Photothermal beam deflection techniques, Reflection, Stepwise reflectivity profile, Thin films, Ultraviolet mirrors |
Abstract | Photoacoustic (PA) and photothermal (PT) beam deflection techniques were used to measure the laser damage threshold of a mirror with a stepwise reflectivity profile designed for KrF excimer lasers (248 nm). It was found that the presence of a sharp step in the coating thickness and thus in the mirror reflectivity, do not introduce a critical area for damage. |
Note | cited By 5 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034156307&doi=10.1116%2f1.582212&partnerID=40&md5=e3e9dc12af17df562538b63f049dfe7f |
DOI | 10.1116/1.582212 |
Citation Key | Diso2000477 |