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Structural properties of carbon-implanted TiN coatings studied by glancing-incidence X-ray diffraction

TitoloStructural properties of carbon-implanted TiN coatings studied by glancing-incidence X-ray diffraction
Tipo di pubblicazioneArticolo su Rivista peer-reviewed
Anno di Pubblicazione2001
AutoriTagliente, M.A., Falcone R., Mello D., Esposito C., and Tapfer Leander
RivistaMaterials Science Forum
Volume378-381
Paginazione723-728
ISSN02555476
Parole chiavecarbon, Carbon doses, Coatings, Crystal structure, Crystallinity, Glacing incidence x ray diffraction, Ion beam physical vapor deposition, Ion implantation, Modification, Physical vapor deposition, Residual stresses, Secondary ion mass spectrometry, Thin films, Titanium compounds, Titanium nitride coatings, X ray beam, X ray diffraction analysis
Abstract

We investigate the structural properties and, in particular, the residual stress of carbon implanted TiN coatings by means of glancing incidence x-ray diffraction and secondary ion mass spectrometry. The coatings were grown by ion beam physical vapor deposition on steel substrates and subsequently implanted at 100 KeV with carbon doses of 1×1017 ions/cm2, 3×1017 ions/cm2 7×1017 ions/cm2, respectively. The carbon depth profiles obtained by secondary ion mass spectrometry enable us to choose the more appropriate x-ray beam incidence angles in order to detect the structural variations in proximity of the implanted region. The x-ray results indicate notable variations both in the crystallinity and in the residual stress and such modifications depend on the carbon dose and penetration depth.

Note

cited By 0; Conference of 7th European Powder Diffraction Conference ; Conference Date: 20 May 2000 Through 23 May 2000; Conference Code:58844

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0035177570&partnerID=40&md5=2112b968707fb6dd6efcb1abda879add
Citation KeyTagliente2001723