Titolo | Structural properties of carbon-implanted TiN coatings studied by glancing-incidence X-ray diffraction |
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Tipo di pubblicazione | Articolo su Rivista peer-reviewed |
Anno di Pubblicazione | 2001 |
Autori | Tagliente, M.A., Falcone R., Mello D., Esposito C., and Tapfer Leander |
Rivista | Materials Science Forum |
Volume | 378-381 |
Paginazione | 723-728 |
ISSN | 02555476 |
Parole chiave | carbon, Carbon doses, Coatings, Crystal structure, Crystallinity, Glacing incidence x ray diffraction, Ion beam physical vapor deposition, Ion implantation, Modification, Physical vapor deposition, Residual stresses, Secondary ion mass spectrometry, Thin films, Titanium compounds, Titanium nitride coatings, X ray beam, X ray diffraction analysis |
Abstract | We investigate the structural properties and, in particular, the residual stress of carbon implanted TiN coatings by means of glancing incidence x-ray diffraction and secondary ion mass spectrometry. The coatings were grown by ion beam physical vapor deposition on steel substrates and subsequently implanted at 100 KeV with carbon doses of 1×1017 ions/cm2, 3×1017 ions/cm2 7×1017 ions/cm2, respectively. The carbon depth profiles obtained by secondary ion mass spectrometry enable us to choose the more appropriate x-ray beam incidence angles in order to detect the structural variations in proximity of the implanted region. The x-ray results indicate notable variations both in the crystallinity and in the residual stress and such modifications depend on the carbon dose and penetration depth. |
Note | cited By 0; Conference of 7th European Powder Diffraction Conference ; Conference Date: 20 May 2000 Through 23 May 2000; Conference Code:58844 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035177570&partnerID=40&md5=2112b968707fb6dd6efcb1abda879add |
Citation Key | Tagliente2001723 |