| Title | Laser damage studies on MgF2 thin films |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 2001 |
| Authors | Protopapa, Maria Lucia, de Tomasi F., Perrone M.R., Piegari A., Masetti E., Ristau D., Quesnel E., and Duparre A. |
| Journal | Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films |
| Volume | 19 |
| Pagination | 681-688 |
| ISSN | 07342101 |
| Keywords | Deposition, Electron beam evaporation, Excimer lasers, Laser damage, Magnesium compounds, Photoacoustic beam deflection, Photoacoustic effect, Scanning electron microscopy, Substrates, Thin films |
| Abstract | A 248 nm KrF excimer laser was used to study the damage on MgF2 thin films deposited on fused silica and CaF2 substrates. The photoacoustic beam deflection technique was used to obtain information on the radiation-film interaction processes, which can be used to validate the damage processes revealed by scanning electron microscopy (SEM). A large intrinsic tensile stress resulted from the mismatch between the thermal expansion coefficient of a fused silica substrate and the MgF2 film. |
| Notes | cited By 13 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035273638&doi=10.1116%2f1.1347049&partnerID=40&md5=9987301b9c39b0a0990b95a82b0fab7d |
| DOI | 10.1116/1.1347049 |
| Citation Key | Protopapa2001681 |
