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Ablation of transition metal oxides by different laser pulse duration and thin films deposition

TitleAblation of transition metal oxides by different laser pulse duration and thin films deposition
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2000
AuthorsA. Guidoni, Giardini, Flamini C., Varsano F., Ricci M., Teghil R., Marotta V., and Di Palma T.M.
JournalApplied Surface Science
Volume154
Pagination467-472
ISSN01694332
KeywordsCeramic coatings, Deposition, Ion beams, Laser ablation, Luminescence, Mass Spectrometry, Morphology, Optical properties, Oxides, Protective coatings, Pulsed laser applications, Pulsed laser deposition (PLD), Spectroscopic analysis, Thin films
Abstract

Thin films of transition metal oxides are of interest in many applications such as anticorrosion coatings and optical and electrochromic devices. In this work, the effect of different wavelength and pulse duration on ablation of oxides target has been investigated. The plume has been characterized by mass spectrometry and optical spectroscopy. Ablation thresholds have been measured by detecting ion emission from the target and from the onset of the plume luminescence. Morphology and optical properties of thin films deposited in different conditions are presented.

Notes

cited By 17; Conference of The Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference (ICPEPA-3) ; Conference Date: 1 June 1999 Through 4 June 1999; Conference Code:56645

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0000603905&doi=10.1016%2fS0169-4332%2899%2900397-9&partnerID=40&md5=a832b5d41830c16c40fda4f244a5ec1f
DOI10.1016/S0169-4332(99)00397-9
Citation KeyGiardiniGuidoni2000467