The laser induced damage in optical coatings plays a limiting role in the laser reliability. Either the laser cavity mirrors and the optical components employed outside the cavity are often damaged by the laser radiation delivered by high power lasers. Their resistance becomes more critical at shorter wavelengths, therefore the research is focused on the ultraviolet region where excimer lasers are finding many applications. Laser damage studies were performed at 248 nm (KrF laser) and 308 nm (XeCl laser) on MgF2, HfO2 and SiO2 single films and multilayer coatings. Results about the dependence of damage threshold on both the deposition technique and the standing-wave electric field profile inside the coating, are reported. © 2001 SPIE.

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