Bi-based high temperature superconduting multilayers have been obtained by Molecular Beam Epitaxy (MBE) using a deposition method which consists of both co-deposition and growth interruption techniques. We have studied two kinds of structures in which a layer of BizSrzCuOg+s (2201) is alternately stacked by an insulating layer of CaCuOi or SrCuOi in order to obtain 2201/CaCuO2 or IWl/SrCuO?. multilayers. Reflection High Energy Electron Diffraction (RHEED), used to control the quality of the interfaces and the two-dimensional growth mode, gives evidence of an increase in the surface roughness increasing the number of periods. The layered structure has been confirmed comparing experimental and simulated Xray spectra. The R vs. T curves of the 22Ql/SrCuC>2 multilayers present an onset and behave differently from those of the single phase samples with the same stoichiometry but they are not superconducting down to T = 4.2K. On the contrary, the 22Ql/CaCuC>2 samples are superconducting with critical temperatures strongly depending on the CaCuOz thickness. © 1999 IEEE.

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