| Title | Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 2008 |
| Authors | Penza, Michele, Aversa Patrizia, Cassano Gennaro, Suriano Domenico, Wlodarski W., Benetti M., Cannatà D., Di Pietrantonio F., and Verona E. |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 55 |
| Pagination | 1237-1243 |
| ISSN | 00189383 |
| Keywords | Acoustic resonators, Carbon nanotubes, Chemical sensors, Langmuir Blodgett films, Langmuir-Blodgett (LB) nanocomposite film, Semiconducting silicon, Silicon substrate, Single-walled carbon nanotubes (SWCNTs), Substrates, Thin-film bulk acoustic resonator (TFBAR) |
| Abstract | A thin-film bulk acoustic resonator (TFBAR) based on a vibrating membrane of AlN/Si3N4 has been fabricated onto a silicon substrate and functionally characterized as gas sensor at a resonating frequency of 1.045 GHz. This novel TFBAR-based gas sensor has been functionalized by a sensing nanocomposite layer, prepared by a Langmuir-Blodgett (LB) technique, of single-walled carbon nanotubes (SWCNTs) embedded in a host matrix of organic material of cadmium arachidate. High-performance gas detection at room temperature of a SWCNT-coated TFBAR sensor has been reported. The sensing device exhibits high sensitivity (e.g., acetone: 12 kHz/ppm; ethylacetate: 17.3 kHz/ ppm), fast response (within 2-3 min), slow reversibility (within 1 h), and good repeatability (≤5% variation) of response toward tested organic vapors of acetone, ethylacetate, and toluene. © 2008 IEEE. |
| Notes | cited By 61 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-43749084169&doi=10.1109%2fTED.2008.919283&partnerID=40&md5=f9d2bf58dc7d3627ef76fee4b60b11ec |
| DOI | 10.1109/TED.2008.919283 |
| Citation Key | Penza20081237 |
