Produzione Scientifica
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Filters: Author is Vasanelli, L. and Keyword is Titanium nitride [Clear All Filters]
X-ray reflectivity analysis of thin TiN and TiOxNy films deposited by dual-ion-beam sputtering on (100) Si substrates,
, Thin Solid Films, Volume 298, Number 1-2, p.130-134, (1997)