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Produzione Scientifica

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Filters: Author is Signore, M.A. and Keyword is Magnetrons  [Clear All Filters]
2010
Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering, Signore, M.A., Rizzo Antonella, Tapfer Leander, Piscopiello E., Capodieci Laura, and Cappello A. , Thin Solid Films, Volume 518, Number 8, p.1943-1946, (2010)