Produzione Scientifica
Found 2 results
Filters: Author is Signore, M.A. and Keyword is Secondary ion mass spectrometry [Clear All Filters]
Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering,
, Thin Solid Films, Volume 518, Number 8, p.1943-1946, (2010)
Characterization of zirconium oxynitride films obtained by radio frequency magnetron reactive sputtering,
, Thin Solid Films, Volume 515, Number 17, p.6798-6804, (2007)